High-reflection submount for light-emitting diode package and fabrication method thereof

ABSTRACT

A method for fabricating a silicon submount for LED packaging. A silicon substrate is provided. A reflection layer is formed on the silicon substrate. Portions of the reflection layer and the silicon substrate are removed to form openings. A wafer backside grinding process is carried out to thin the silicon substrate thereby turning the openings into through silicon vias. An insulating layer is then deposited to cover the reflection layer and the silicon substrate. A seed layer is formed on the insulating layer. A resist pattern is then formed on the seed layer. A metal layer is formed on the seed layer not covered by the resist pattern. The resist pattern is then stripped. The seed layer not covered by the metal layer is then removed.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a Divisional of U.S. application Ser. No.13/024,337, filed on Feb. 10, 2011 and entitled “HIGH-REFLECTIONSUBMOUNT FOR LIGHT-EMITTING DIODE PACKAGE AND FABRICATION METHODTHEREOF”, which claims the priority from U.S. provisional applicationNo. 61/303,683 filed Feb. 12, 2010, the entirety of which areincorporated by reference herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates generally to light-emitting diodepackaging. More particularly, the present invention relates tohigh-reflection silicon submounts for light-emitting diode packaging andfabrication method thereof.

2. Description of the Prior Art

As known in the art, a light-emitting diode (LED) is a semiconductorlight source. LEDs are used as indicator lamps in many devices, and areincreasingly used for lighting. When a light-emitting diode is forwardbiased (switched on), electrons are able to recombine with holes withinthe device, releasing energy in the form of photons. LEDs present manyadvantages over incandescent light sources including lower energyconsumption, longer lifetime, improved robustness, smaller size, fasterswitching, and greater durability and reliability.

In order to achieve the high lumens output and flux density, the LEDsmust be driven at high current levels, which in turn results in highlevels of heat generation. Special packaging techniques need to beemployed to prevent the degradation of LED quantum efficiency, due totemperature increases. However, the conventional ceramic submount orsubstrate material for LED packaging has unsatisfactory heat dissipatingefficiency, hence leading to reliability issue and decrease of LED'slifetime. In addition to the heat dissipation issue, the LEDmanufacturers are also facing problems such as relatively highproduction cost and inadequate illumination efficiency.

Therefore, there is a need in this industry to provide an improved LEDsubmount to solve the conventional heat dissipation issue due to the useof ceramic submount, which is also capable of reducing LED productioncost and increasing LED illumination efficiency.

SUMMARY OF THE INVENTION

It is one objective of the present invention to provide an improvedmethod for fabricating a high-reflection silicon submount for LEDpackaging in order to solve the above-mentioned prior art problems.

According to one preferred embodiment of this invention, a method forfabricating a silicon submount for LED packaging is provided. A siliconsubstrate is prepared. A reflection layer is formed on the siliconsubstrate. Portions of the reflection layer and the silicon substrateare removed to form openings. A wafer backside grinding process iscarried out to thin the silicon substrate thereby turning the openingsinto through silicon vias. An insulating layer is then deposited tocover the reflection layer and the silicon substrate. A seed layer isformed on the insulating layer. A resist pattern is then formed on theseed layer. A metal layer is formed on the seed layer not covered by theresist pattern. The resist pattern is then stripped. The seed layer notcovered by the metal layer is then removed.

According to one preferred embodiment of this invention, a method forfabricating a silicon submount for LED packaging is provided. A siliconsubstrate is prepared. A reflection layer is formed on the siliconsubstrate. A portion of the reflection layer and the silicon substrateis etched away to form an opening. A wafer backside grinding process isperformed to thin the silicon substrate, thereby turning the openinginto a through silicon via. An insulating layer covering the reflectionlayer and silicon substrate is formed. A metal seed layer covering theinsulating layer is formed. A photoresist pattern is formed on theinsulating layer to define a redistribution layer pattern. A portion ofthe metal seed layer not covered with the photoresist pattern is etchedaway to expose a portion of the insulating layer. The photoresistpattern is removed after etching the metal seed layer. A metal layer iselectroplated on the metal seed layer.

According to still another preferred embodiment of this invention, asilicon submount for LED package is provided. The silicon submountincludes a silicon substrate having a reflection layer disposed on oneside of the silicon substrate; a through silicon via penetrating throughthe reflection layer and the silicon substrate; an insulating layercovering the reflection layer and the silicon substrate; and aredistribution layer on the insulating layer.

According to yet another preferred embodiment of this invention, an LEDpackage is provided. The LED package includes a silicon submount; an LEDdie mounted on the silicon submount; and a bond wire, electricallyconnecting an electrode of the LED die to a bonding pad of the siliconsubmount. The silicon submount includes a silicon substrate having areflection layer disposed on one side of the silicon substrate; athrough silicon via penetrating through the reflection layer and thesilicon substrate; an insulating layer covering the reflection layer andthe silicon substrate; and a redistribution layer on the insulatinglayer

These and other objectives of the present invention will no doubt becomeobvious to those of ordinary skill in the art after reading thefollowing detailed description of the preferred embodiment that isillustrated in the various figures and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 to FIG. 6 are schematic, cross-sectional diagrams showing anexemplary method for fabricating a silicon submount for LED packaging inaccordance with one preferred embodiment of this invention.

FIG. 7 to FIG. 12 are schematic, cross-sectional diagrams showing anexemplary method for fabricating a silicon submount for LED packaging inaccordance with another preferred embodiment of this invention.

FIG. 13 is a schematic, cross-sectional diagram showing an LED packagein accordance with another embodiment of this invention.

DETAILED DESCRIPTION

The invention pertains to a method of fabricating a silicon submount forlight emitting device package, which can be incorporated into the waferlevel chip scale package (WLCSP) processes. In one embodiment, the lightemitting device package structure may be fabricated using a WLCSPprocess to package a light emitting device, for example, a light emitteddiode (LED) or laser diode (LD). The wafer level chip scale packageprocess mentioned above mainly means that after the package process isaccomplished during the wafer stage, the wafer with chips is cut toobtain separate independent packages.

However, in an embodiment of the invention, separate independent chipsmay be redistributed overlying a supporting wafer serving as a carrierand then be packaged, which may also be referred to as a wafer scalepackage process. In addition, the above mentioned wafer scale packageprocess may also be adapted to form electronic device packages ofmulti-layer integrated circuit devices by stacking a plurality of wafershaving integrated circuits.

It is another technical feature of the invention that the fabrication ofthe silicon submount incorporates through silicon via (TSV) technology.

FIG. 1 to FIG. 6 are schematic, cross-sectional diagrams showing anexemplary method for fabricating a silicon submount for LED packaging inaccordance with one preferred embodiment of this invention. As shown inFIG. 1, a silicon wafer or silicon substrate 10 such as a singlecrystalline silicon wafer or substrate having (100) crystal orientation.A sputtering process is then carried out to form a reflection layer 11merely on the front side 10 a of the silicon substrate 10. For example,the reflection layer 11 may be composed of aluminum or silver,preferably aluminum. It is to be understood that the aforesaidreflection layer 11 may be formed by other processes other thansputtering, for example, electroplating, physical vapor deposition(PVD), chemical vapor deposition (CVD) or atomic layer deposition (ALD)process.

As shown in FIG. 2, subsequently, a lithographic process and an etchingprocess are carried out to etch away a portion of the reflection layer11 and the silicon substrate 10, thereby forming openings 12. Each ofthe openings 12 is substantially in the position where the throughsilicon via (TSV) to be formed. For example, the aforesaid lithographicprocess includes forming a photoresist layer (not shown) on thereflection layer 11, subjecting the photoresist layer to exposure anddevelopment processes, thereby transferring the mask pattern thatdefines the pattern of TSV onto the photoresist layer, then performingan etching process to remove the reflection layer 11 not covered withthe patterned photoresist layer, then etching the silicon substrate 10to a predetermined depth, and thereafter stripping the remainingphotoresist layer.

As shown in FIG. 3, a wafer backside grinding process is carried out topolish and thin the silicon substrate 10 from the backside 10 b of thesilicon substrate 10, thereby turning the openings 12 into throughsilicon vias (TSVs) 12 a. Subsequently, a deposition process such as achemical vapor deposition (CVD) process is performed to form atransparent insulating layer 13 such as silicon dioxide on the frontside 10 a and backside 10 b of the silicon substrate 10, on thereflection layer 11 and on the sidewall of each of the TSVs 12 a.

As shown in FIG. 4, a physical vapor deposition (PVD) process isperformed to form a metal seed layer 14 such as copper seed layer on theinsulating layer 13 on the front side 10 a and backside 10 b of thesilicon substrate 10, and on the insulating layer 13 within each of theTSVs 12 a. The metal seed layer 14 may comprise TiW and Cu. Thereflection layer 11 is insulated from the metal seed layer by theinsulating layer 13.

As shown in FIG. 5, a photoresist pattern 15 is then formed on the metalseed layer 14 on the front side 10 a and backside 10 b of the siliconsubstrate 10. The photoresist pattern 15 defines a redistribution layer(RDL) pattern. Subsequently, an electroplating process is performed toform a metal layer 16 on the metal seed layer 14 not covered with thephotoresist pattern 15. The metal layer 16 may comprise copper andnickel/gold layer on the copper layer.

As shown in FIG. 6, the photoresist pattern 15 is removed to reveal aportion of the metal seed layer 14. Thereafter, the exposed metal seedlayer 14 is etched away to reveal a portion of the insulating layer 13,thereby completing the fabrication of the high-reflection siliconsubmount 1. A redistribution layer 22 is formed on the insulating layer13 on the front side 10 a of the silicon substrate 10 and aredistribution layer 24 is formed on the insulating layer 13 on thebackside 10 b of the silicon substrate 10. The redistribution layer 22is electrically connected to the redistribution layer 24 through theTSVs 12 a. A light emitting device (not shown) may be surface mounted onthe front side 10 a of the silicon substrate 10 and may be electricallyconnected to the redistribution layer 22 by wire bonding.

It is one advantage of the present invention that the reflection layer11 can increase the light utilization efficiency by 3-5%. Besides, theheat dissipating efficiency of the silicon substrate is better than thatof the ceramic substrates. Further, the production cost is reducedbecause the fabrication process for making the silicon submount thatincorporates the TSV technology is simplified. For example, thereflection layer and the TSVs can be defined using one single mask.

FIG. 7 to FIG. 12 are schematic, cross-sectional diagrams showing anexemplary method for fabricating a silicon submount for LED packaging inaccordance with another preferred embodiment of this invention, whereinlike numeral numbers designate like elements, layers and regions.

As shown in FIG. 7, likewise, a silicon wafer or silicon substrate 10such as a single crystalline silicon wafer or substrate having (100)crystal orientation. A sputtering process is then carried out to form areflection layer 11 merely on the front side 10 a of the siliconsubstrate 10. For example, the reflection layer 11 may be composed ofaluminum or silver, preferably aluminum. It is to be understood that theaforesaid reflection layer 11 may be formed by other processes otherthan sputtering, for example, electroplating, physical vapor deposition(PVD), chemical vapor deposition (CVD) or atomic layer deposition (ALD)process.

As shown in FIG. 8, subsequently, a lithographic process and an etchingprocess are carried out to etch away a portion of the reflection layer11 and the silicon substrate 10, thereby forming openings 12. Each ofthe openings 12 is substantially in the position where the throughsilicon via (TSV) to be formed. For example, the aforesaid lithographicprocess includes forming a photoresist layer (not shown) on thereflection layer 11, subjecting the photoresist layer to exposure anddevelopment processes, thereby transferring the mask pattern thatdefines the pattern of TSV onto the photoresist layer, then performingan etching process to remove the reflection layer 11 not covered withthe patterned photoresist layer, then etching the silicon substrate 10to a predetermined depth, and thereafter stripping the remainingphotoresist layer.

As shown in FIG. 9, a wafer backside grinding process is carried out topolish and thin the silicon substrate 10 from the backside 10 b of thesilicon substrate 10, thereby turning the openings 12 into throughsilicon vias (TSVs) 12 a. Subsequently, a deposition process such as achemical vapor deposition (CVD) process is performed to form atransparent insulating layer 13 such as silicon dioxide on the frontside 10 a and backside 10 b of the silicon substrate 10, on thereflection layer 11 and on the sidewall of each of the TSVs 12 a.

As shown in FIG. 10, a physical vapor deposition (PVD) process isperformed to form a metal seed layer 14 such as copper seed layer on theinsulating layer 13 on the front side 10 a and backside 10 b of thesilicon substrate 10, and on the insulating layer 13 within each of theTSVs 12 a. The metal seed layer 14 may comprise TiW and Cu. Thereflection layer 11 is insulated from the metal seed layer by theinsulating layer 13.

As shown in FIG. 11, a photoresist pattern 17 is formed on the metalseed layer 14 on the front side 10 a of the silicon substrate 10 and onthe metal seed layer 14 on the backside 10 b of the silicon substrate10. The photoresist pattern 17 defines the redistribution layer pattern.Subsequently, the metal seed layer 14 not covered with the photoresistpattern 17 is etched away, thereby exposing a portion of the insulatinglayer 13. The photoresist pattern 17 is then stripped.

As shown in FIG. 12, an electroplating process is performed to form ametal layer 16 on the metal seed layer 14. The metal layer 16 maycomprise copper and nickel/gold layer on the copper layer.

FIG. 13 is a schematic, cross-sectional diagram showing an LED packagein accordance with another embodiment of this invention. As shown inFIG. 13, after the formation of the high-reflection silicon submount 1as described above, an LED die 30 is surface mounted on the die pad 25on the silicon submount 1. The LED die 30 may comprise a first electrode32 and a second electrode 34. The first electrode 32 is electricallyconnected to the die pad 25. The second electrode 34 is electricallyconnected to a bonding pad 26 on the high-reflection silicon submount 1through bond wire 36.

Those skilled in the art will readily observe that numerousmodifications and alterations of the device and method may be made whileretaining the teachings of the invention. Accordingly, the abovedisclosure should be construed as limited only by the metes and boundsof the appended claims.

What is claimed is:
 1. A method for fabricating a silicon submount,comprising: providing a silicon substrate; forming a reflection layer onthe silicon substrate; etching away a portion of the reflection layerand the silicon substrate to form an opening; performing a waferbackside grinding process to thin the silicon substrate, thereby turningthe opening into a through silicon via; forming an insulating layercovering the reflection layer and silicon substrate; forming a metalseed layer covering the insulating layer; forming a photoresist patternon the insulating layer to define a redistribution layer pattern;forming a metal layer on the metal seed layer not covered with thephotoresist pattern; removing the photoresist pattern; and removing themetal seed layer not covered with the metal layer.
 2. The method forfabricating a silicon submount according to claim 1 wherein thereflection layer comprises aluminum or silver.
 3. The method forfabricating a silicon submount according to claim 1 wherein theinsulating layer comprises silicon dioxide.
 4. The method forfabricating a silicon submount according to claim 1 wherein theinsulating layer is a transparent insulating layer.
 5. The method forfabricating a silicon submount according to claim 1 wherein the metalseed layer comprises TiW or copper.
 6. The method for fabricating asilicon submount according to claim 1 wherein the metal layer comprisescopper or a nickel layer.
 7. A method for fabricating an LED package,comprising: providing a silicon submount fabricated according to claim1; mounting an LED die on the silicon submount; and electricallyconnecting an electrode of the LED die to a bonding pad of the siliconsubmount by wire bonding.
 8. A method for fabricating a siliconsubmount, comprising: providing a silicon substrate; forming areflection layer on the silicon substrate; etching away a portion of thereflection layer and the silicon substrate to form an opening;performing a wafer backside grinding process to thin the siliconsubstrate, thereby turning the opening into a through silicon via;forming an insulating layer covering the reflection layer and siliconsubstrate; forming a metal seed layer covering the insulating layer;forming a photoresist pattern on the insulating layer to define aredistribution layer pattern; etching away a portion of the metal seedlayer not covered with the photoresist pattern to expose a portion ofthe insulating layer; removing the photoresist pattern after etching themetal seed layer; and electroplating a metal layer on the metal seedlayer.
 9. The method for fabricating a silicon submount according toclaim 8 wherein the reflection layer comprises aluminum or silver. 10.The method for fabricating a silicon submount according to claim 8wherein the insulating layer is a transparent insulating layer.
 11. Themethod for fabricating a silicon submount according to claim 8 whereinthe metal seed layer comprises TiW or copper.
 12. The method forfabricating a silicon submount according to claim 8 wherein the metallayer comprises copper or a nickel layer.
 13. A method for fabricatingan LED package, comprising: providing a silicon submount fabricatedaccording to claim 8; mounting an LED die on the silicon submount; andelectrically connecting an electrode of the LED die to a bonding pad ofthe silicon submount by wire bonding.